TECH: Major Chip Advance Announced
DOUG.BAILEY@EY.COM
Thu, 26 Feb 1998 12:16:47 -0500
A research team has achieved .08 micron printing precision with current
technology (193 nm wavelength) light.
http://dailynews.yahoo.com/headlines/technology/story.html?s=n/reuters/980226/tech/stories/chips_2.h
Doug Bailey
doug.bailey@ey.com